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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • A system for generating a model for use in matching measured spectra from an optical scatterometer with performance parameters associated with a processed semiconductor wafer, comprising: a spectroscopic ellipsometer operative to measure at least one optical constant associated with an unpatterned wafer and to provide a file including the at least one optical constant according to film and process
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