About: isa:143530520   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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prov:value
  • wherein the means is a structure wherein the piping unit comprises inner and outer pipes coaxially disposed, said inner pipe connecting the pipe extending from the remote plasma unit and the rectifying plate and communicating the remote plasma unit and the lower space of the showerhead without exposing the active species of cleaning gas to the upper space of the showerhead, said outer pipe being p
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