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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The exposure mask has light shielding portions 752 a, 752 b, and 752 c formed of metal films such as Cr and a portion provided with semi-transmissive films 751 a, 751 b, and 751 c as an auxiliary pattern.
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