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  • At this time, since a negative pressure is established within the main tank 11, it is possible to cause the cleaning solvent 100 contained in the supply tank 61 to move into the main tank 11 without connecting any equipment such as a pump to the supply tank 61. [0085] As described above, it is possible to easily refill the main tank 11 with the cleaning solvent 100 without interrupting the operati
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