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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • ssible individual wafer processing modules in selective vacuum communication with the transport module, each processing module being capable of performing at least one wafer coating, etching or other treating process on a wafer in a vacuum processing chamber contained therein; at least one load-lock module enclosing a load-lock chamber therein alternately communicable with the internal volume of t
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