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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • This invention is a thing which was made in view of the above-described problem, and has, as a problem, providing a film forming apparatus which is of high throughput, and can form a high-density EL layer, and a manufacturing apparatus which has the film forming apparatus in one chamber.
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