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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The substrate 12 can comprise a semiconductive material such as monocrystalline silicon, polycrystalline silicon, germanium, or gallium arsenide, or epitaxial layers of silicon support by a base semiconductor foundation, for example, or an insulating layer if silicon-on-insulator (S-O-I) or a similar technology is used.
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