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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The silane is provided to an appropriate flow control valve at a flow rate of between about 10 sccm to about 500 sccm, such as between about 50 sccm to about 200 sccm, and thereafter pulsed for about 1 second or less, such as about 0.2 seconds or less.
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