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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • cted from W, Ti, and Ta; nitride of a material including one or more kinds of elements selected from W, Mo, Ti, and Ta; silicon nitride of a material including Ti; oxide of a material including one or more kinds of elements selected from Ir, and Ru; or a compound or mixture thereof.
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