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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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prov:value
  • least a part of a surface of the first drain or source region and at least a part of a surface of the third drain or source region, wherein the first silicide layer is formed in an area other than an area in which a contact for at least the first drain or source region and the third drain or source region is formed.08-19-2010
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