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b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
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isa:178300591
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An Entity of Type :
prov:Entity
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webisa.webdatacommons.org
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The nozzle chamber 1310 can be constructed using the standard MEMS processes including forming the various layers using the sacrificial material such as silicon dioxide and subsequently sacrificially etching the lower layers away.
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google.com.au
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isap:46371088
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