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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The test board 9 having the semiconductor devices 2 inserted therein passes through the transfer passage 13a or 13b and is fed to the rotary cleaning stage 15 in which an electrode provided on the reverse surface of the test board 9 is cleaned by such means as air blowing, and it is then stored within the storage unit 16 by the moving robot 17.
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