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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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prov:value
  • A process chamber comprising:a sealed chamber having walls, means for generating a vacuum in the chamber; a substrate holder disposed within the chamber and including means for holding a substrate; means for introducing a gas into the chamber; means for generating by electron-cyclotron resonance a gas plasma and for magnetically confining the plasma to a region surrounding the substrate holder and
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