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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • A photomask substrate processing device comprising: a surface analyzer configured to measure a flatness of a surface of a substrate, the surface including a portion on which a predetermined pattern is to be formed and a peripheral portion outside the portion, the substrate being disposed in a substantially horizontal position and supported at the peripheral portion, and having the surface facing d
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