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  • 00Applied Materials, Inc.Sputter target for eliminating redeposition on the target sidewallUS60713232 mars 19986 juin 2000TdkcorporationGiven amount of rare earth element and transition metal element including at least one of iron, nickel and cobalt, homogeneous sintered structure; regenerating by pulverizing, mixing with specific alloy blend used to make target, firingUS607138917 ao???t 19996 jui
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