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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • providing a liquid to a space between a projection system and a substrate with a liquid supply system that includes a liquid outlet and a member extending along at least part of the boundary of the space, the member including a liquid inlet located on a surface of the member which faces the substrate, the liquid outlet being separate from the liquid inlet and adjacent each other on a same side of
prov:wasQuotedFrom
is prov:wasDerivedFrom of
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