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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The present invention relates to a semiconductor device including an insulation film and a fabrication method thereof More particularly, the present invention relates to a semiconductor device including an insulation film such as an interlayer insulation film or a passivation film superior in water resistance, and a method of fabrication thereof.
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