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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The passivation film 716 is formed by an insulating film including a carbon film, a silicon nitride film or a siliconoxynitride film, and used is an insulating film in a single layer or a combined lamination.In such a case, it is preferred to use a film favorable in coverage as
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