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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • he groove portion; removing the metal film other than a portion thereof which has been converted to the metal silicide after the step of reacting the silicon film and the metal film; and forming a second insulating film on the metal silicide layer to form one of a wiring and an electrode which is covered with the first and the second insulating film. 2.
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