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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • This gate metal may be formed using atomic layer deposition, e-beam deposition, or another type of deposition with an appropriate metal or conductor such as platinum (Pt), a titanium gold (Ti/Au) bilayer, aluminum, polysilicide, polysilicon, and many others.
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