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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • For purposes of the present application, a microelectronic workpiece is defined to include a workpiece formed from a substrate, such as a silicon wafer, upon which microelectronic circuits or components, data storage elements or layers, and/or micro-mechanical elements are or may be formed.
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