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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • It is preferred that the protective film on the transparent support 12 is stable under etching conditions, for example in an etching liquid at 50??? C. It is particularly preferred that the protective film is not degraded by an alkali component in the etching liquid when immersed therein for several minutes.
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