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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Selectivity is particularly important, for example, in embodiments comprising a plurality of sacrificial layers with different thickness because some of the sacrificial layers will be etched away faster than others, thereby exposing some of the underlying non-sacrificial materials to the etchant for a longer time.
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