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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • As a material of a wetted part of the main body 12 of the micro device, it is possible to use metallic materials such as iron, aluminum, stainless steel, titanium, and various alloys, resin materials such as a fluorocarbon resin, and an acrylic resin, and glass materials such as silicon, and glass.
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