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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Examples of the material include: (1) a conductive film such as polysilicon, (2) metals such as copper and aluminum, (3) high melting point metal such as tungsten, titanium, and tantalum, and (4) either a single layer film made of a high melting point metal and silicide etc., or a film stack made of a high melting point metal and silicide etc, and the like.
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