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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • A circuit element, such as a transistor, having been created in the diffusion region, and bounded by an oxide isolation structure 118, it is known to provide a subsequent dielectric layer 124, such as CVD Borophosphosilicate glass (BPSG) overlying the transistor structure 120a-c and isolation structures 118.
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