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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • ing a relatively thick layer of a passivating dielectric material on said surface except over most of said source and drain regions and the space therebetween, depositing separate relatively thick ribbon-like layers of a contact metal on each of said source and drain regions and extending continuously over the surface of said passivating layer to locations remote from said source and drain, deposi
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