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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • An optical inspection system for inspecting objects formed on substrates selected from the group consisting of photomasks, reticles, phase shift masks and semiconductor wafers including a plurality of supposedly identical patterned objects disposed in an ordered array on a surface thereof, comprising:laser means for providing a pixel illuminating beam of light; optical means defining a first optic
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