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  • On the other hand, examples of a chemically amplifiable negative resist include a resin composition including a a copolymer of a vinyl or acrylic compound having aromatic ring(s) with 4 to 12 conjugated double bonds in the side chain(s) and an alkali-soluble acrylic or vinyl compound such as acrylic acid, vinyl naphthol or the like, an optical acid generating agent, and a compound capable of cross
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