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  • nc.Thin dielectric films for DRAM storage capacitorsUS6541280Mar 20, 2001Apr 1, 2003Motorola, Inc.High K dielectric filmUS6548825 *Jun 5, 2000Apr 15, 2003Matsushita Electric Industrial Co., Ltd.Semiconductor device including barrier layer having dispersed particlesUS6586797Aug 30, 2001Jul 1, 2003Micron Technology, Inc.Graded composition gate insulators to reduce tunneling barriers in flash memory
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