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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • An apparatus for detecting a foreign particle on a surface of a substrate having a circuit pattern comprising:irradiating means for irradiating a polarized laser beam spot linearly scanning on the substrate in a direction inclined with respect to a direction perpendicular to the surface of the substrate, the irradiating means including a polarized laser source for generating a polarized laser beam
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