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  • n decreases in the electron cyclotron resonance area (curve 26), where its value is 875 G, and itthen goes down to 500 G (27), and the magnetic field is a minimum, for example 500 G to the center of the deposition chamber (28, 29), and the magnetic field then increases firstly up to 600 G (30) and then further to reach a value of 700 to 1000 G onthe substrate, for example from 750 G to 800 G.There
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