About: isa:27157034   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • ingsUS7195696Nov 26, 2003Mar 27, 2007Novellus Systems, Inc.Electrode assembly for electrochemical processing of workpieceUS7247223Apr 28, 2003Jul 24, 2007Semitool, Inc.Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpiecesUS7285195Jun 24, 2004Oct 23, 2007Applied Materials, Inc.Electric field reducing thrust plateUS74
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software