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  • That is, the depth of the cavity 104 is set so as not to be substantially n?????c/4, more particularly, so as to be equal to or larger than n?????c/2?????c/8 and equal to or smaller than n?????c/2+??c/8 (n is an integer), thereby suppressing spurious resonance near the resonant frequency of the vibrating portion 110.
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