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  • Examples of the material for the insulating film 241 are an inorganic insulating film such as an SiNx or SiO2 film, an organic insulating film such as polyimides (???: 3.3, dielectric resistance: 300 V/mm), a BCB film (???: 2.7, dielectric resistance: 400 V/mm)), an acrylic photosensitive resin Optomer PC film ???: 3.2), resist, or a black resist, and a stacked structure of these films.
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