Either the exposed or unexposed portions of the ultra-thin photoresist layer 64 are removed or developed to provide the patterned photoresist 74. [0046] The width ???w??? of the cross-section of the exposed portion of the metal layer 60 (opening 80 in the patterned photoresist 74) is about 0.25 ??m or less, including about 0.18 ??m or less, about 0.09 ??m or less, about 0.075 ??m or less and about