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  • Examples of trench dielectric materials include conventional oxides, nitrides, oxynitrides, and other dielectrics, such as borophosphosilicate glass (BPSG), borosilicate glass (BSG), fluorosilicate glass, phosphosilicate glass, undoped silicate glass, spin-on glass (SOG), P-doped silicon oxide (P-glass), silicon nitride (SixNy), silicon dioxide, silicon oxynitride (e.g. of the general formula [Sia
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