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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • A force sensor 2 has a structure 6 consisting of insulators such as silicon rubber and conductors provided on a substrate 4, as well as an electrode 8 on the ceiling of the structure 6 and a detection electrode 10 facing the electrode 8 on the side of the substrate 4.
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