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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • routing in a hermetically sealed MEMS deviceUS6951797 *17 Oct 20004 Oct 2005Imego AbMethod relating to anodic bondingUS698703319 Aug 200417 Jan 2006Harris CorporationMethod for making electronic devices including silicon and LTCC and devices produced therebyUS719539331 May 200227 Mar 2007Rochester Institute Of TechnologyMicro fluidic valves, agitators, and pumps and methods thereofUS720562511 Aug
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