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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • rporationMethod for making electronic devices including silicon and LTCC and devices produced therebyUS20030020173 *20 May 200230 Jan 2003Huff Michael A.Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substratesUS2003003984311 Jul 200227 Feb 2003Christopher JohnsonPhotocatalyst; vapor deposition of organometallic compound, oxidationUS2003014
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