Examples of other applicable light source include gas lasers such as a carbon dioxide laser, a nitrogen laser, an Ar laser, a He/Ne laser, a He/Cd laser and a Kr laser; liquid (dye) lasers; solid lasers such as a ruby laser and an Nd/YAG laser; semiconductor lasers such as a GaAs/GaAlAs laser and an InGaAs laser; and excimer lasers such as a KrF laser, an XeCl laser, an XeF laser and an ArF laser.