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  • When the conductive metal layer 3 made of copper is formed by a sputtering method, for example, it is preferred to use copper (preferably oxygen-free copper) as a target, and vent the sputtering machine to a degree of vacuum (ultimate vacuum) of preferably 1??10???3 Pa or less to create an atmosphere in which water in the sputtering machine and impurities such as an organic gas generated from the
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