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  • When a Knudsen-cell type of vaporizing source, the horizontal section of which is circular, is used and inert gas is supplied into the cell of the vaporizing source from the side wall by an acute angle (which is an angle formed by a tangent at the position where gas is blown in and the direction of the flow of gas which has been blown in), a vortex flow can be generated in the cell, so that inert
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