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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The process includes the steps of: (1) providing a thin film of a dielectric material; (2) placing the thin film on a pattern anvil having a pattern of raised areas wherein the height of the raised areas is greater than the thickness of the film; (3) conveying the film, while placed on the pattern anvil, through an area where a fluid selected from the group including one or more of water, mineral
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