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  • herein n is an integer), and the opposite phase means that a phase difference is not less than (150+360???n) degrees and not more than (210+360???n) degrees (wherein n is an integer). [0016] In the first photomask, since the main pattern is composed of the semi-shielding portion and the phase shifter, lights passing through the transparent portion and the semi-shielding portion can be partially ca
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