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  • The biasing member 1104 is comprised of a resilient material or device and may be a compression spring, flat spring, coil spring, a foamed polymer such as foamed polyurethane (e.g., PORON???), an elastomer, a bladder or other member or device that urges the conductive member 1100. [0118]FIG. 11B depicts another embodiment of a conductive member 1150 disposed in the pocket 1004 of the polishing art
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