About: isa:307360998   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The multi-layered metal lines comprising metal lines in a first insulating layer with an overlying second layer can be formed by performing the foregoing sequence of the first embodiment at least two times, or performing the foregoing sequence of the second embodiment at least two times, or by performing any combination including the sequence of the first embodiment and the sequence of the second
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