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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The at least one aperture in the diaphragm is then closed by depositing or growing a sealing material, such as silicon dioxide, in said aperture and/or over said diaphragm layer, e.g. as by chemical vapour deposition, preferably at low pressure, or by thermal oxidation in oxygen, both of which result in a reduced pressure being obtained in the cavity formed between the diaphragm and the substrate.
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