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  • The pathway has exit ports 210 that introduce cesium to the outer surface 55 of the target 50, on which the electrons are confined by the magnetic field from magnets 40 and 45.It should also be understood that while argon is typically utilized as the sputtering gas, the invention is not limited to the use of argon gas and that any suitable sputtering gas, for example Xenon, may be utilized in the
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