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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The power supply apparatus of claim 5 or 6, including a plurality of types of power sources for supplying high frequency voltages of different frequencies, and wherein the high frequency power source for an output voltage of the lowest frequency is connected to the coil on an outermost periphery, and the high frequency power source for an output voltage of a relatively high frequency is connected
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